Exploring The Fundamentals Of Photolithography
Exploring The Fundamentals Of Photolithography
May 23, 2024
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SOLVED: Photoresist is a light-sensitive material applied to semiconductor wafers so that the circuit pattern can be imaged on to the wafer: After application, the coated wafers are baked to remove the solvent in the photoresist mixture and to harden the resist: Here are measurements of photoresist thickness (in kA) for eight wafers baked at two different temperatures Assume that all of the runs were made in random order.95 % 11.176 7.089 8.097 11.739 11.291 10.759 6.467 8.315100 %C 5.623 6.748
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