Introduction of fully automated EUV pellicle mounter and demounter (EPMD)
Introduction of fully automated EUV pellicle mounter and demounter (E…
1 month ago
spiedigitallibrary.org
29 reactions | Our EUV pellicles are 20 times thinner than the membrane of a soap bubble. In our lithography machines, the pellicle prevents particles from contaminating the mask that contains the pattern to be printed on the chip. The pellicle catches the particles and keeps them 'out of focus', while still letting through extreme ultraviolet (EUV) light. | ASML | Facebook
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29 reactions | Our EUV pellicles are 20 times thinner than the membra…
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FacebookASML
Introduction of fully automated EUV pellicle mounter and demounter (EPMD)
Introduction of fully automated EUV pellicle mounter and demounter (E…
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