Patterning control strategies for minimum edge placement error in logic devices
Patterning control strategies for minimum edge placement error in logic devices
3 months ago
spiedigitallibrary.org
Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation
2:54
Have you seen our video on multiple patterning? Several clever multiple patterning strategies have been developed to create tiny, densely packed features on chips. Check out our video to learn how the techniques work! | Lam Research Corporation
11.8K viewsDec 19, 2016
FacebookLam Research Corporation
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